Electronic Grade N-Methyl Monoethanolamine (MMEA)

Electronic Grade N-Methyl Monoethanolamine (MMEA)

1. Core features (electronic level)

• Ultra-high purity: ≥ 99.9% (much higher than industrial grade 99.5%)
• Very low impurities: metal ions (Fe ≤ 1ppB, Cu ≤ 1ppB), moisture ≤ 50ppm, chromaticity ≤ 10
• Difunctional group: containing hydroxyl (-OH) and secondary amino groups (-NHCH), with the properties of both alcohols and amines
• Solubility: Soluble with polar solvents such as water, alcohols, and ketones

II. Core uses in the electronics industry

• Photoresist stripping solution: After semiconductor wafer photolithography, the photoresist is efficiently stripped without residue or corrosion of the substrate
• CMP polishing additive: in chemical mechanical polishing, adjust polishing rate and improve wafer surface flatness
• Metal surface passivation/cleaning: used for cleaning and passivation of copper, aluminum and other metal wiring, anti-corrosion and clean
• Electrolyte additive: In lithium battery electrolyte, inhibit aluminum current collector corrosion and improve battery stability

III. Key differences from industrial-grade MMEA

• Purity: Electronic grade ≥ 99.9%; Industrial grade ≥ 99.5%
• Metal ions: electronic grade ppb grade; industrial grade ppm grade
• Moisture: Electronic grade ≤ 50ppm; Industrial grade ≤ 0.1%
• Applications: Electronic grade for 5nm and below advanced processes; industrial grade for desulfurization, polyurethane, pharmaceutical intermediates

IV. Key points of production, storage and transportation

• Process: methylamine + ethylene oxide addition → multistage vacuum distillation → inert gas protection → ultrapure filtration
• Packaging: Electronic grade clean plastic drum/stainless steel drum, anti-static, sealed
• Storage and transportation: cool, dry, ventilated, protected from light; avoid contact with acids and oxidants