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Tetrakis(Dimethylamino)Titanium

    • Product Name Tetrakis(Dimethylamino)Titanium
    • Alias TDMAT
    • Einecs 242-856-8
    • Mininmum Order 1 g
    • Factory Site Tengfei Creation Center,55 Jiangjun Avenue, Jiangning District,Nanjing
    • Price Inquiry admin@sinochem-nanjing.com
    • Manufacturer Sinochem Nanjing Corporation
    • CONTACT NOW
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    Specifications

    HS Code

    825365

    Chemical Name Tetrakis(dimethylamino)titanium
    Chemical Formula Ti(N(CH3)2)4
    Cas Number 3275-24-9
    Molecular Weight 257.38 g/mol
    Appearance Colorless to pale yellow liquid
    Boiling Point 55-60 °C (at 0.5 mmHg)
    Density 1.04 g/cm³
    Melting Point -20 °C
    Solubility Hydrolyzes in water, soluble in organic solvents
    Vapor Pressure 8 mmHg at 20 °C
    Purity Typically ≥ 99%
    Storage Conditions Store under inert gas, tightly closed, dry and cool place

    As an accredited Tetrakis(Dimethylamino)Titanium factory, we enforce strict quality protocols—every batch undergoes rigorous testing to ensure consistent efficacy and safety standards.

    Packing & Storage
    Packing 500 mL amber glass bottle with screw cap, labeled "Tetrakis(Dimethylamino)Titanium," moisture-sensitive, stored under inert gas, hazard markings visible.
    Shipping Tetrakis(Dimethylamino)Titanium should be shipped in airtight, sealed containers under an inert gas, such as nitrogen, to prevent reaction with moisture or air. It must be clearly labeled as a hazardous material, handled with proper protective equipment, and transported according to regulations for flammable, moisture-sensitive chemicals.
    Storage Tetrakis(Dimethylamino)Titanium should be stored in a tightly sealed container under an inert atmosphere, such as argon or nitrogen, to prevent hydrolysis and oxidation. Store the chemical in a cool, dry, and well-ventilated area, away from moisture, heat sources, and incompatible materials such as acids and oxidizing agents. Use appropriate chemical-resistant containers and avoid exposure to air and direct sunlight.
    Application of Tetrakis(Dimethylamino)Titanium

    Applications of Tetrakis(Dimethylamino)Titanium in Industrial Manufacturing

    As a direct manufacturer of Tetrakis(Dimethylamino)Titanium (TDMAT), we support a range of specialized production environments. This organotitanium compound serves as a key functional material in thin film deposition and surface modification for advanced industries. Below, we outline the major established downstream sectors where TDMAT performs a critical role, with specifications reflecting regulatory, formulation, and operational details from real industrial practice.

    1. Semiconductor Titanium Nitride (TiN) Thin Film Deposition

    In semiconductor device fabrication, TDMAT acts as a titanium precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) routes to TiN films, which enhance barrier properties, electromigration resistance, and device integrity. Foundries and IDM fabs integrate the precursor directly in metallization and transistor gate stack steps, adhering to the latest process controls for microelectronics.

    Industry compliance standards

    • SEMI C93: Specifications for High-Purity Precursor Chemicals
    • IATF 16949: Automotive Semiconductor Quality Management System
    • RoHS 3 (EU Directive 2015/863): Restriction of Hazardous Substances

    Typical usage ratio

    • Precursor feed rates range from 0.1 to 1.0 sccm in ALD/CVD toolsets, adjusted by substrate area, film thickness, and process temperature.

    Downstream process integration

    • Dispensing via vapor phase delivery into ALD/CVD chambers after vacuum purge and preheat stabilization.
    • Direct injection concurrent with ammonia or nitrogen sources to facilitate nitride formation layer-by-layer.

    Final product types

    • Integrated circuit wafers with TiN barrier/liner layers
    • Logic and memory device finished dies
    • Read/write heads in hard disk drive manufacturing

    2. Microelectromechanical Systems (MEMS) Coatings

    MEMS device manufacturers rely on TDMAT for conformal TiN coatings that impart electrical conductivity, chemical resistance, and wear protection to sensor and actuator structures. The precursor’s vapor delivery profile supports integration on complex 3D microstructures within batch or single-wafer platforms.

    Industry compliance standards

    • ISO 13485:2016 for medical MEMS components
    • IEC 60747-14: Standards for semiconductor micro-devices
    • Cleanroom compatibility: ISO Class 5–6 air cleanliness protocols

    Typical usage ratio

    • Precursor partial pressures set at 0.01–0.10 Torr, matching device type and film thickness (typically 50–200 nm depostion).

    Downstream process integration

    • Bubbler-based delivery through heated lines under nitrogen blanket to ALD/CVD reactors after device etch and surface activation.
    • Simultaneous pulsing with co-reactants to achieve pinhole-free encapsulation on suspended or embedded microstructures.

    Final product types

    • Pressure and flow sensors
    • RF MEMS switches
    • Microvalves and accelerometers for industrial and medical instrumentation

    3. Advanced Hard Coatings for Cutting Tools

    Tool coating facilities use TDMAT as a titanium source for plasma-enhanced CVD or ALD growth of TiN hard layers on carbide and steel substrates, which dramatically enhances abrasion resistance and lifespan under high-load machining. The volatile nature of TDMAT enables uniform deposition on complex tool geometries while maintaining phase purity and consistency.

    Industry compliance standards

    • ISO 9001:2015 certified production for cutting tool manufacture
    • ISO 13399 Tool Data Exchange and Traceability
    • OEM machining performance specifications (Milling, Turning, Drilling Standards)

    Typical usage ratio

    • Dosing into the reactor at 0.5–2% of total titanium precursor feed by molar ratio, tuned by desired TiN layer thickness and substrate surface area.

    Downstream process integration

    • Vapor-phase introduction after base cleaning, positioned prior to nitrogen plasma treatment or co-reactant admission.
    • Real-time precursor pulsing controlled via mass flow controllers linked with temperature monitoring for run consistency.

    Final product types

    • Indexable carbide inserts with TiN or TiCN coatings
    • Solid end mills and drills
    • Wear-resistant punch and die tools for forming operations

    4. Photovoltaic Cell Metallization Barrier Films

    Solar cell manufacturing lines employ TDMAT in ALD/CVD steps for the deposition of TiN segments as diffusion barriers and contact layers in crystalline and thin-film photovoltaic architectures. The controlled introduction of TDMAT ensures uniformity and efficiency in large-area panel fabrication, reducing performance losses and improving service life.

    Industry compliance standards

    • IEC 61215:2021 for crystalline silicon terrestrial PV modules
    • UL 1703: Design and Safety of Flat-Plate Photovoltaic Modules
    • TUV Rheinland PV Module Quality Assurance

    Typical usage ratio

    • Flow rates typically between 0.05–0.5 sccm, adjusted based on module size and desired film thickness (10–50 nm TiN layer on busbars and contact points).

    Downstream process integration

    • Precursor supplied via automated vaporizer modules after pre-treatment and surface texturization.
    • Introduced into in-line ALD or CVD chambers, synchronized with roll-to-roll glass or wafer transport systems.

    Final product types

    • Silicon and thin-film photovoltaic panels with built-in TiN contact or barrier interfaces
    • Back-contact PV cells
    • High-efficiency heterojunction solar modules

    5. Optical Coatings for Anti-Reflective and Decorative Surfaces

    Glass and optics manufacturers apply TDMAT to deposit TiN-based coatings that control reflectance and add gold-like decorative qualities for architectural glass and specialty optics. The precursor’s stability and vapor delivery traits enable high uniformity in both batch and in-line vacuum systems, supporting visual quality and surface durability needs.

    Industry compliance standards

    • EN 1096-1: Glass in building – Coated glass regulation
    • ISO 9211: Optical Coating Specifications
    • REACH Regulation (EC) No 1907/2006 for chemical safety

    Typical usage ratio

    • Feed concentrations of 0.01–0.1 mol% relative to total precursor input, depending on target thickness (under 100 nm) and substrate dimensions.

    Downstream process integration

    • Vapor-phase introduction post-cleaning and preheating of glass or optical components in magnetron sputtering chambers equipped with ALD/CVD integration.
    • Process sequencing coordinated with co-reactant gas flows for consistent optical density and color profile.

    Final product types

    • Architectural facade and privacy glass
    • Optical filters and laser protection windows
    • Decorative hardware for automotive and consumer electronics
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    Certification & Compliance
    More Introduction

    Tetrakis(Dimethylamino)Titanium: A Closer Look Inside the Factory Gate

    What Makes Our Tetrakis(Dimethylamino)Titanium Stand Out?

    On the shop floor, every batch of Tetrakis(Dimethylamino)Titanium (known in the industry by its shorthand, TDMAT or Ti(NMe2)4) starts with the right blend of chemicals, real people overseeing each reaction, and strict monitoring step by step. Workers have handled titanium organics for years—long enough to recognize by smell, color, cooling rates, or even the scrape of a container when things go right. Our TDMAT keeps up with constant requests for tighter tolerance: electronics-grade, trace-metal control, moisture-limited packaging. It’s always tricky, because this isn’t a product to be rushed. The slightest hint of air or water, and you know right away the batch won’t pass: color deepens, purity numbers slip, and the whole run can wind up off-spec.

    Factories like ours take pride in actual throughput and reliability, not expectations. Because TDMAT is sensitive and reactive, the most common failings elsewhere are inconsistent product quality, vapor pressure swings, and unacceptably tough residue in end-user processes. The operations team here has been around organometallics for decades, and that kind of experience shows up in every drum and cylinder. This direct experience means we maintain a level of product quality that supports advanced microelectronics, ALD (atomic layer deposition), and MOCVD (metal-organic chemical vapor deposition) lines around the world.

    Understanding the Product: Tetrakis(Dimethylamino)Titanium Basics

    A shelf filled with clear, straw-yellow TDMAT means production chemistry ran as planned: titanium tetrachloride first meets dimethylamine under strictly dry conditions, creating the signature molecule with the formula Ti[N(CH3)2]4. As soon as pressure builds in the glassware, the material is drawn off, chilled, and transferred to containers lined for moisture resistance. Every batch receives a full run of GC, ICP-OES, and Karl Fischer titration—no room to cut corners. Down the line, a quality team pulls random samples; a failed water content or the presence of common metal traces stops shipping in its tracks.

    The compound has a vapor pressure appropriate for safe, predictable vapor-phase delivery, especially compared to legacy titanium sources. Our specifications typically run at or above 99.999% purity (5N), and the product contains less than 1 ppm metallic impurities—standard for applications where even a trace element can ruin a microchip yield. Each container comes tightly purged with inert gas, sealed, tested for pinhole leaks, and packaged by workers who view any deviation as everyone’s problem.

    Differences That Matter Compared to Other Titanium Alkylamides

    Most operators in fabs or pilot plants don’t care about theoretical differences—they want deposition without fouling, low metal residue, clean lines. TDMAT holds an edge over predecessors like titanium isopropoxide or tetrakis(ethylmethylamido)titanium, especially in thermal stability and lower carbon contamination. We realized early that TDMAT’s decomposition profile, reactivity with water, and final residue levels fit ongoing equipment upgrades and ever-tightening substrate requirements.

    Real-world feedback makes a difference: customers comparing direct side-by-side runs report less buildup in ALD and MOCVD nozzles, easier equipment maintenance, and fewer rejected lots due to out-of-spec carbon or oxygen levels. Titanates based on longer-chain alkylamides bring more side reactions, variable vaporization, and unpredictable impurities. As plants trend toward hard-to-manage architectures, the choice isn’t just about price per kilogram—quality means improved process uptime, less downtime for cleaning, and higher device yields on the back-end. It’s not an abstract distinction when a fraction of a percent difference costs hours of rework on the fab line.

    Customer Experiences and the Push for Higher Purity

    Years of delivering TDMAT cylinders and drums have taught us lessons that data sheets can’t cover. A memory chip maker, chasing 0.1% bump in device consistency, traced sporadic electrical drift to trace metals in precursor material. After switching to our high-purity TDMAT, rejection rates fell, and process engineers noticed easier tuning of ALD pulse cycles. Another customer struggled with residual carbon build-up in gate oxides, but the low-carbon signature of our synthesis route cut bake-out times by 40%.

    Delivery times matter, too. Some customers need small, frequent lots for pilot fabs; others want weekly tonnage with zero variability. Our logistics team stocks on-site cylinders pre-tested with mock hardware adapters, and we stagger batch production to line up with just-in-time requirements, even for international customers. Container return and reconditioning often seems unglamorous, but it has real impact: reusing specialty bottles without introducing new contamination stands as a game-changer for big semiconductor foundries.

    We hear from customers who moved away from imported or gray-market stock after seeing subtle yield losses. Many assumed impurities were a fact of life, not something a manufacturer could genuinely tackle. Direct feedback has shaped new handling protocols—double-bagging, real-time QR code batch tracking, relentless focus on internal cleaning—and credit belongs to the on-site staff just as much as the analytical chemists.

    What Real Manufacturing Looks Like for TDMAT

    Organometallic titanium production rarely reads like a chemistry textbook. Each batch involves a dozen critical steps, from solvent drying to transfer under inert gas blankets. On the factory floor, experienced hands spot equipment issues or drifting temperatures before sensors do. This hands-on oversight means we catch problems—a drop in pressure or odd tint—before they travel any further down the line.

    The control room tracks every batch parameter, but the best results come from blending technology with veteran knowledge. Inexperienced facilities often overlook small contaminants or the effect of even a few minutes' exposure during transfers. We built routines around regular equipment flushes, scheduled filter swaps, and a double-person signoff on every valve change. These routines prevent the kind of accidental contamination that can turn a good batch into a useless one.

    Unlike some resellers who never see the inside of a reactor, every pump, pipe, or bottle at our plant passes through hands trained in the quirks of titanium chemistries. From the design of vapor delivery systems—where rough welds or cheap seals invite leaks—to the selection of liners for storage, quality arises from years of hard-won trial. Stories from the floor include overnight phone calls for cycler resets, revalidation of analytical equipment, or strangely behaving valves. These experiences shape better product, not just in spec sheets, but on actual production lines—yours and ours.

    Why TDMAT Has Become the Workhorse in ALD/MOCVD

    The next generation of memory and logic devices runs on thin, uniform films with atomic-level control. For ALD and MOCVD, TDMAT’s volatility, reactivity, and low contamination footprint set the bar. In practice, the product helps engineers create titanium dioxide and other films with improved consistency, fewer pinholes, and less variation in stoichiometry. The pure stuff wins out: even a spike in halides or metals slows throughput and saps device reliability.

    Plasma-based ALD, thermal ALD, and various forms of CVD each ask slightly different questions from a precursor. With TDMAT, our customers push for lower deposition temperatures and shorter precursor pulses. A smoother decomposition pathway yields cleaner films and less coking in the lines, which keeps maintenance costs down. Fab engineers tell us the most valuable feature isn’t a theoretical spec; it’s the reduction in maintenance downtime and increases in tool availability. More meters of consistent, pure film let them meet their run quotas without guessing at every substrate.

    Regulatory and Shelf-Life Realities for TDMAT Handling

    Practical compliance with today’s regulatory climate shapes our manufacturing and shipping choices. National and international authorities run spot checks, review hazardous material certifications, and demand transparent traceability. Keeping TDMAT within legal guidelines takes more than paperwork: routine risk assessments, employee hazmat training, and regular fire suppression system inspections add real value, not just regulatory comfort.

    The shelf life of TDMAT depends on handling as much as formulation. Drums and cylinders head out with guaranteed purity for six months under factory-sealed conditions, but actual shelf time shrinks with every break-in. Trained operators in both the sending and receiving plants use clean rooms, double containment, and end-to-end monitoring to combat degradation. Regular audits of packaging techniques and container materials stand between uncontrollable reactivity and safe, productive use.

    Potential Challenges, Solutions, and Ongoing Developments

    No compound moves directly from chemistry bench to mass production without hurdles. In the early days, TDMAT shipments suffered from instability—bottle outgassing, moisture ingress, and residue formation. We devoted years to retraining staff, upgrading gaskets and seals, and securing more predictable supply chains for high-purity solvents and raw titanium chloride. Every tweak, from new dunnage inside shipping crates to anti-tamper seals on bottle necks, started with feedback from line operators and transport teams.

    One persistent issue, universal across the industry, comes from the trade-off between faster throughput and higher risk of thermal decomposition. Experienced technicians have learned to balance heating rates and line velocities with precise carrier gas mixes to keep yield and quality up. At times, batch reprocessing or incremental purification cycles hold deliveries back to make specs; nobody here likes losing a shipping slot or missing an order, but trusting analytical results over outside deadlines builds long-term credibility that shortcuts never do.

    Growing demand for process transparency means more customers want not just the product, but a clear window into its production. In-plant sampling, third-party audits, and video walkthroughs create trust. We expect requests for more granular batch-level data, novel container types for new deposition tools, and even custom labeling or racking systems aligned to individual customer process flows.

    Looking Ahead: Sustainability and Process Upgrades

    Everyone in manufacturing cares about safety, but we started paying more attention as TDMAT sales grew. The team phased out legacy solvents with questionable health records, replaced chlorinated cleaning cycles, and invested in more precise ventilation controls. Waste handling infrastructure expanded, with continuous pressure monitoring at collection tanks and third-party verification of scrubbing efficiency.

    Energy efficiency takes a prominent role: we’ve tested upgraded heat exchangers and programmable temperature profiles to optimize every batch without wasting extra megawatts. Scrupulous solvent recycling and recovery now stands next to regular abatement of waste gases, protecting everyone on-site and in the community.

    A steady push for greener alternatives keeps our product development labs busy. Researchers here experiment with lower-toxicity organics for future precursor blends, and we track all developments in international environmental legislation. It’s critical for any manufacturer with a future in the market, and every shift toward greater sustainability adds to the value our workers build every day.

    The Manufacturer's Perspective: Lessons in Making TDMAT Work for You

    Ask anyone on the team, and you’ll hear the same message: fine titanium amides like TDMAT reward care, patience, and pride in craft. Each batch tells a story of cumulative improvement—every “lesson learned” leading to a more stable, safer, and cleaner outcome down the line. Our customers expect certainty, so our operations schedule redundancy into every critical step: double checks, backup valves, and secondary containment mean fewer surprises for both plant and user.

    What sets this factory apart from a reseller or third-party handler circles back to ownership of every risk and every improvement. From precursor selection to packaging, batch-to-batch consistency links directly to a culture of continuous feedback and worker empowerment. We’ve seen more customers ask their process engineers to visit, inspect, and even work alongside our staff. This two-way teaching smooths problems out before they grow, keeps open the potential for further innovation, and fosters the kind of trust that’s rare in specialty chemical supply.

    By understanding that TDMAT isn’t just a stock number but a complex, reactive, and challenging compound, we have shaped systems, processes, and teams not just to meet but to anticipate production demands. Our work happens out in the open—in the labs, the control rooms, and on the line—and every success is built on experience, not just a set of data or a marketing flyer. Real quality, in our view, means a drum or cylinder that performs across the world in the toughest fabrication environments, every time.